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AR5T-NCHR

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Quick Overview

Silicon probe with high aspect ratio tip (>5) for deep trench imaging.

f = 330 kHz   |   k = 42 N/m   |   tip coating: none
Product Name Price Qty
AR5T-NCHR (50 Pack)
(Ships in 1-2 Weeks)
€4,542.00
AR5T-NCHR (20 Pack)
(Ships in 1-2 Weeks)
€2,059.00
AR5T-NCHR (10 Pack)
(Ships in 1-2 Weeks)
€1,150.00

Details

High Aspect Ratio (> 5:1, Tilted 13°) - Non-Contact / Tapping Mode - High Resonance Frequency - Reflex Coating

NANOSENSORS™ AR5T-NCHR sensors are designed for non-contact mode or Tapping Mode AFM (also known as: attractive or dynamic mode). This sensor type combines high operation stability with outstanding sensitivity and fast scanning ability.
For measurements on samples with sidewall angles approaching 90° NANOSENSORS™ produces specially tailored tips. These tips are FIB (Focused Ion Beam) milled to achieve a high aspect ratio portion at the end of the common silicon tip. This subtractive method of producing the high aspect ratio needle offers the advantage of high lateral stiffness and rigidity of the tip. On the model AR5T the last 2 µm of the tip are tilted 13° to the center axis of the cantilever. With this feature the tilt angle of the cantilever caused by the mount of the AFM head (commonly 13°) will be compensated. Now, nearly vertical sidewalls can be measured offering a symmetrical scan.

The probe offers unique features:
  • Length of the high aspect ratio portion of the tip > 2 µm
  • Typical aspect ratio at 2 µm in the order of 7:1 (when viewed from side as well as along cantilever axis)
  • High aspect ratio portion of the tip tilted 13° to the center axis of the cantilever
  • Half cone angle at 2 µm of the high aspect ratio portion typically < 5°
  • Guaranteed tip radius of curvature < 15 nm
  • Highly doped silicon to dissipate static charge
  • High mechanical Q-factor for high sensitivity


    Cantilever Specifications
    Spring k (N/m 42 (10 - 130)
    Freq (kHz) 330 (204 - 497)
    Length (µm) 125 (115 - 135)
    Width (µm) 30 (22.5 - 37.5)
    Thickness (µm) 4.0 (3.0 - 5.0)
    Shape rectangular
    Material Silicon
    Reflex Coating (nm) Al (30) none

    Tip Specifications
    Tip radius (nm) <15
    Tip height (µm) 12.5 +/- 2.5
    Front angle (°) 25 +/- 2
    Back angle (°) 15 +/- 2
    Side angle (°) 22.5 +/- 2
    Tip shape 4-sided
    Tip material Silicon
    Tip coating (nm) none

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    Additional Information

    Tip Radius 15
    Tip Radius 10-20 nm
    Spring Constant 42
    Frequency 330
    Compatibility blueDrive
    Manufacturer Nanosensors

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